Sierra Instruments Announces MEMS-Based Thermal Mass Flow Controllers and Meters

RedySmart mass flow meters and controllers and RedyCompact flow meters and regulators from Sierra Instruments use micro-electromechanical systems (MEMS) technology and complementary metal oxide semiconductor sensors to improve original equipment manufacturer (OEM) applications and replace antiquated rotameters.

The meters and controllers were designed with no moving parts and are unaltered by upstream temperature and pressure fluctuations, according to a Jan. 15, 2020 company press release. The devices also offer a compact footprint, easy integration onto a gas mixing block, and various communications protocols.

RedySmart mass flow meters and controllers include:

• A lifetime no-drift sensor warranty for the repairment or replacement of a device if a drift occurs

• Modular-customization

• A precision valve to assume the exact height above the valve orifice necessary to maintain flow to the set point

• Fast set point control with response times reaching +/-80ms

• Advanced calibration over its entire flow range using real gas to assure accuracy and repeatability

• A human and system interface to communicate flow data while each device can be configured in the field with a software application

• Flow range up to 500 slpm.

RedyCompact flow meters and regulators include:

• A lifetime no-drift sensor warranty

• Mass flow, not volumetric, for improved accuracy

• Flow control via a precision needle valve

• A compact design and small footprint

• Touch-screen display

• Flow alarms to notify user when a flow event happens

• Advanced calibration.

Source: Sierra Instruments